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ID 114295
Title Alternative
An Automated Basic Gases Monitor Coupled with a Parallel-plate Wet Denuder for Monitoring of Ammonia and Amines in Clean Rooms
Author
Shiramizu, Yoshimi Office SHIRAMIZU
Tanaka, Masaru National Institute of Technology, Tsuruoka College
Keywords
basic gases monitor
parallel-plate wet denuder
ion chromatography
ammonia
amine
clean room
Content Type
Journal Article
Description
クリーンルーム雰囲気に含まれる微量アンモニア(NH3)及びアミンガスを準リアルタイムで監視できる塩基性ガス自動モニタを開発した.塩基性ガスの捕集には自作のウエットデニューダを用いた.ガス成分を捕集した捕集液は,10方電動バルブに装備された2本の陽イオン濃縮カラムの片方に送液され,そこでガス成分が濃縮される.10方電動バルブは15分毎に切り替わり,濃縮成分は逐次的にイオンクロマトグラフで定量される.このときにウエットデニューダから送られてくる捕集液は,もう一方の濃縮カラムに送られ,そこで捕集液中のガス成分が濃縮されるため,本モニタは塩基性ガス濃度を連続的に監視することができる.ウエットデニューダは,ガス吸引流量2.5 L min−1においてモノエタノールアミン(MEA)ガスを定量的に捕集し,MEAガスの濃度変化に対しても十分な応答性を示した.NH3,MEA及びN-メチルエタノールアミン(N-MEA)ガスの検出限界値は,それぞれ0.005 μg m−3,0.01 μg m−3,0.02 μg m−3であり,本モニタを半導体製造ラインのクリーンルーム雰囲気中NH3とN-MEAガスの連続測定に応用した.
Description Alternative
This paper describes the automated basic gases measuring technology for the near-real-time monitoring of ammonia (NH3) and amines in a clean room. The analytes collected with a parallel-plate wet denuder (PPWD) are continuously pumped into one of two cation concentration columns for 15 min, and determined on-line by means of ion chromatography. While one concentration column is used for chromatographic separation, the other is used for loading the sample solution. The PPWD collects quantitatively mono ethanolamine (MEA) gas at a sampling flow rate of 2.5 L min−1. The response time to any variability in the MEA gas concentration is fast enough for near-real-time monitoring. The limits of detection are 0.005 μg m−3 for NH3 gas, 0.01 μg m−3 for MEA gas, and 0.02 μg m−3 for N-methylethanolamine (N-MEA) gas. The NH3 and N-MEA gas concentrations have been successfully measured at semiconductor manufacturing clean rooms.
Journal Title
BUNSEKI KAGAKU
ISSN
05251931
NCID
AA11681958
Publisher
日本分析化学会
Volume
66
Issue
7
Start Page
503
End Page
508
Published Date
2017-07-05
EDB ID
DOI (Published Version)
URL ( Publisher's Version )
FullText File
language
jpn
TextVersion
Publisher
departments
Pharmaceutical Sciences