ID 112172
Author
Takashima, Yuusuke Tokushima University|Japan Society for the Promotion of Science Tokushima University Educator and Researcher Directory
Keywords
Subwavelength
Refractive index sensor
Grating
Content Type
Journal Article
Description
A high-sensitivity refractive index sensor is demonstrated for the first time, near the ultraviolet (UV) wavelength region using a Si3N4-subwavelength grating (SWG) with a normal incident optical geometry. Using the eigenmode within the Si3N4-SWG, a high sensitivity for the refractive index is expected by finite-difference time-domain calculation, without an oblique incident geometry. The proposed SWG is fabricated and the high-sensitivity refractive index sensor operating near the UV wavelength is experimentally and successfully developed. The normal transmitted intensity through the fabricated SWG varies considerably with slight changes in the refractive index. The experimental sensitivity of the SWG attained 1240 % per refractive index unit (RIU) and the sensitivity shows good agreement with the calculation. These experimental results suggest that our refractive index sensor with a normal incident geometry can measure a refractive index change of 8.06 x 10-4 RIU, if the optical detection system can measure an intensity change of 1%.
Journal Title
Sensors and Actuators B : Chemical
ISSN
09254005
NCID
AA11540366
AA1078104X
Publisher
Elsevier
Volume
255
Issue
Part 2
Start Page
1711
End Page
1715
Published Date
2017-08-30
Remark
論文本文は2019-08-30以降公開予定
Rights
© 2017. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
EDB ID
DOI (Published Version)
URL ( Publisher's Version )
language
eng
TextVersion
その他
departments
Science and Technology