ID 112462
Author
Hsieh, Yi-Da Tokushima University|Japan Science and Technology Agency
Shibuya, Kyuki Tokushima University|Japan Science and Technology Agency
Hase, Eiji Tokushima University|Japan Science and Technology Agency
Kaneoka, Yoshiki Tokushima University
Okubo, Sho Japan Science and Technology Agency|National Institute of Advanced Industrial Science and Technology
Inaba, Hajime Japan Science and Technology Agency|National Institute of Advanced Industrial Science and Technology
Mizutani, Yasuhiro Japan Science and Technology Agency|Osaka University KAKEN Search Researchers
Yamamoto, Hirotsugu Japan Science and Technology Agency|Utsunomiya University KAKEN Search Researchers
Content Type
Journal Article
Description
Spectroscopic ellipsometry is a means of investigating optical and dielectric material responses. Conventional spectroscopic ellipsometry is subject to trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance because of its sensitivity to mechanical vibrational noise, thermal instability, and polarization-wavelength dependency. We combine spectroscopic ellipsometry with dual-comb spectroscopy, namely, dual-comb spectroscopic ellipsometry. Dual-comb spectroscopic ellipsometry (DCSE). DCSE directly and simultaneously obtains the ellipsometric parameters of the amplitude ratio and phase difference between s-polarized and p-polarized light signals with ultra-high spectral resolution and no polarization modulation, beyond the conventional limit. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we construct a polarization-modulation-free DCSE system with a spectral resolution of up to 1.2 × 10−5 nm throughout the spectral range of 1514–1595 nm and achieved an accuracy of 38.4 nm and a precision of 3.3 nm in the measurement of thin-film samples.
Journal Title
Nature Communications
ISSN
20411723
NCID
AA12645905
Publisher
Springer Nature
Volume
8
Start Page
610
Published Date
2017-09-20
Remark
Supplementary Information : ncomms_8_610_s1.pdf
Supplementary Movies : ncomms_8_610_s2.mov, ncomms_8_610_s3.mov, ncomms_8_610_s4.mov, ncomms_8_610_s5.mov, ncomms_8_610_s6.mov, ncomms_8_610_s7.mov
Peer Review File : ncomms_8_610_s8.pdf
Rights
This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
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DOI (Published Version)
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language
eng
TextVersion
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departments
Science and Technology