1. Authors
  2. Kaneko, Kenta

Kaneko, Kenta

Published Date (desc)
ナノスケール銅積層膜の熱処理による表面形状と内部応力の変化挙動
Author Kusaka, Kazuya/ Hanabusa, Takao/ Kaneko, Kenta/ Matsue, Tatsuya/ Sakata, Osami/
Content Type Departmental Bulletin Paper
Journal Title 徳島大学大学院ソシオテクノサイエンス研究部研究報告
Volume 54
Published Date 2009
departments Science and Technology
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