| ID | 45513 |
| Title Transcription | ダイ3セダイ トウメイ ドウデンセイ アモルファス ハクマク ノ ソウセイ
|
| Title Alternative | Fabrication of Third-Generation Transparent Conducting Amorphous Oxide Thin Films
|
| Author |
Moriga, Toshihiro
Department of Chemical Science and Technology, Faculty of Engineering, The University of Tokushima
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Hayashi, Yukako
Department of Chemical Science and Technology, Faculty of Engineering, The University of Tokushima
Mikawa, Michio
Department of Telecommunications, Takuma National College of Technology
Murai, Kei-ichiro
Department of Chemical Science and Technology, Faculty of Engineering, The University of Tokushima
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Tominaga, Kikuo
Department of Electric and Electronic Engineering Faculty of Engineering, The University of Tokushima
|
| Keywords | transparent conducting oxides
thin film
amorphous
zinc oxide
indium oxide
tin oxide
sputtering
pulsed laser deposition
|
| Content Type |
Departmental Bulletin Paper
|
| Description | Transparent conducting amorphous thin films in the systems of ZnO－In2O3 and ZnO－SnO2 could
be deposited on glass substrates by simultaneous DC magnetron sputtering and/or pulsed laser deposition techniques. Post-annealing under the reductive gas flow was effective on improving surface roughness of the amorphous ZnO－In2O3 films deposited by the sputtering method. Introduction of Ar gas as a background gas into a chamber enabled to deposit flat transparent conducting amorphous films directly on the substrates by means of the pulsed laser deposition. Resistivity of amorphous ZnO－SnO2 thin films deposited by the sputtering increased linearly with an increase of zinc content, until the composition reached Zn2SnO4. The linear decrease in resistivity was attributable to a linear carrier concentration probably due to that the increased number of zinc cations occupying the tetrahedral sites in the amorphous structure. |
| Journal Title |
徳島大学工学部研究報告
|
| ISSN | 03715949
|
| NCID | AA1221470X
|
| Volume | 50
|
| Published Date | 2005-03-25
|
| EDB ID | |
| FullText File | |
| language |
jpn
|
| departments |
Science and Technology
|
