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Journal of Vacuum Science & Technology A
34
3
Journal of Vacuum Science & Technology A 34 3
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Residual stress and bending strength of ZnO films deposited on polyimide sheet by RF sputtering system
Author
Kusaka, Kazuya
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Maruoka, Yutaka
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Matsue, Tatsuya
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Content Type
Journal Article
Journal Title
Journal of Vacuum Science & Technology A
Volume
34
Issue
3
Published Date
2016-03-24
departments
Science and Technology
