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ID 118081
Author
Maruoka, Yutaka Tokushima University
Matsue, Tatsuya NIIHAMA College
Content Type
Journal Article
Description
Zinc oxide (ZnO) films were deposited on a soft polyimide sheet substrate by radio frequency sputtering with a ZnO powder target, and the films' crystal orientations and residual stress were investigated using x-ray diffraction as a function of substrate temperature. C-axis oriented ZnO films were achieved using this ZnO powder target method. The ZnO films exhibited high compressive residual stresses between −0.7 and −1.4 GPa. Finally, the authors examined the strength of the obtained film by applying tensile bending loads. No cracks were observed on the surfaces of the ZnO films after a bending test using cylinders with diameters >25 mm. After a bending test using a cylinder with a diameter of 19 mm, large cracks were formed on the films. Therefore, the authors concluded that the tensile bending strength of the obtained films was greater than ∼420 MPa.
Journal Title
Journal of Vacuum Science & Technology A
ISSN
07342101
15208559
Publisher
AIP Publishing
Volume
34
Issue
3
Start Page
031507
Published Date
2016-03-24
Remark
This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Kazuya Kusaka et al., J. Vac. Sci. Technol. A 34(3), 031507 (2016) and may be found at https://doi.org/10.1116/1.4944610.
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DOI (Published Version)
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language
eng
TextVersion
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departments
Science and Technology