EVALUATION OF 3D MEASUREMENT USING CT-TDLAS

In order to satisfy the requirements of high quality and optimal material manufacturing process, it is important to control the environment of the manufacturing process. Depending on these processes, it is possible to improve the quality of the product by adjusting various gases. With the advent of the TDLAS (Tunable laser absorption spectroscopy) technique, the temperature and concentration of the gases can be measured simultaneously. Among them, CT-TDLAS (Computed tomography-tunable diode laser absorption spectroscopy) is the most important technique for measuring the distributions of temperature and concentration across the 2-dimensional planes. In this study, suggest a 3-dimensional measurement to consider the irregular flow of supplying gases. Used the SMART (simultaneous multiplicative algebraic reconstruction technique) algorithm among the CT algorithms. Phantom data sets have been generated by the using Gaussian distribution method. It can be shown expected temperature and concentration distributions. The HITRAN database in which the thermo-dynamical properties and the light spectra of H2O are listed were used for the numerical test. The relative average temperature error ratio in the results obtained by the SMART algorithm was about 3.2% for temperature. The maximum error was 86.8K.

著者名英表記誤記あり　(誤)Mincho Cui→(正)Minchao Cui

Electronic version of an article published as Modern Physics Letters B, Vol. 33, No. 14n15, 2019, 1940018, 10.1142/S0217984919400189 © World Scientific Publishing Company https://www.worldscientific.com/worldscinet/mplb