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ID 115150
Author
Keywords
refractive index sensor
subwavelength grating
GaN
Content Type
Journal Article
Description
Owing to its versatility, optical refractive index (RI) sensors with compact size and high chemical stability are very suitable for a wide range of the applications in the internet of things (IoT), such as immunosensor, disease detection, and blood mapping. In this study, a RI sensor with very simple system and high chemical stability was developed using GaN-based high-contrast grating (HCG). The designed HCG pattern was fabricated on GaN-film grown on c-plane sapphire substrate. The fabricated GaN-HCG sensor can detect minuscule RI change of 1.71 × 10–3 with extreme simple surface normal irradiation system. The light behavior inside the GaN-HCG was discussed using numerical electromagnetic field calculation, and the deep understand of the sensing mechanism was provided. The simple system and very high chemical stability of our sensor exploit RI sensing applications in IoT society.
Journal Title
Sensors
ISSN
14248220
Publisher
MDPI
Volume
20
Issue
16
Start Page
4444
Published Date
2020-08-09
Rights
© 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
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DOI (Published Version)
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language
eng
TextVersion
Publisher
departments
Science and Technology