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ID 115150
著者
キーワード
refractive index sensor
subwavelength grating
GaN
資料タイプ
学術雑誌論文
抄録
Owing to its versatility, optical refractive index (RI) sensors with compact size and high chemical stability are very suitable for a wide range of the applications in the internet of things (IoT), such as immunosensor, disease detection, and blood mapping. In this study, a RI sensor with very simple system and high chemical stability was developed using GaN-based high-contrast grating (HCG). The designed HCG pattern was fabricated on GaN-film grown on c-plane sapphire substrate. The fabricated GaN-HCG sensor can detect minuscule RI change of 1.71 × 10–3 with extreme simple surface normal irradiation system. The light behavior inside the GaN-HCG was discussed using numerical electromagnetic field calculation, and the deep understand of the sensing mechanism was provided. The simple system and very high chemical stability of our sensor exploit RI sensing applications in IoT society.
掲載誌名
Sensors
ISSN
14248220
出版者
MDPI
20
16
開始ページ
4444
発行日
2020-08-09
権利情報
© 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
EDB ID
出版社版DOI
出版社版URL
フルテキストファイル
言語
eng
著者版フラグ
出版社版
部局
理工学系