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ID 118652
Title Alternative
対向ターゲット式DCマグネトロンスパッタ法を用いた透明ITO/GTO二層膜の作製
Author
Sutan Chairul, Imran Bin
Keywords
GTO
ITO
bilayer film
diode
Content Type
Thesis or Dissertation
Published Date
2023-09-25
Remark
内容要旨・審査要旨・論文本文の公開
FullText File
language
eng
TextVersion
ETD
MEXT report number
甲第3751号
Diploma Number
甲先第455号
Granted Date
2023-09-25
Degree Name
Doctor of Engineering
Grantor
Tokushima University