ID | 118652 |
Title Alternative | 対向ターゲット式DCマグネトロンスパッタ法を用いた透明ITO/GTO二層膜の作製
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Author |
Sutan Chairul, Imran Bin
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Keywords | GTO
ITO
bilayer film
diode
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Content Type |
Thesis or Dissertation
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Published Date | 2023-09-25
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Remark | 内容要旨・審査要旨・論文本文の公開
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FullText File | |
language |
eng
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TextVersion |
ETD
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MEXT report number | 甲第3751号
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Diploma Number | 甲先第455号
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Granted Date | 2023-09-25
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Degree Name |
Doctor of Engineering
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Grantor |
Tokushima University
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