| Author | Kawakami, Retsuo/ Makino, Yuta/ Yanagiya, Shin-ichiro/ Shirai, Akihiro/ Niibe, Masahito/ Nakano, Yoshitaka/ |
|---|---|
| Content Type | Journal Article |
| Journal Title | Journal of Vacuum Science & Technology B |
| Volume | 42 |
| Issue | 1 |
| Published Date | 2024-01-11 |
| departments | Science and Technology Bioscience and Bioindustry |
