Author Maeshima, Hiroshi/ Matsumoto, Kosei/ Hirahara, Yasuhiro/ Nakagawa, Takao/ Koga, Ryoichi/ Hanamura, Yusuke/ Wada, Takehiko/ Nagase, Koichi/ Oyabu, Shinki/ Suzuki, Toyoaki/ Kokusho, Takuma/ Kaneda, Hidehiro/ Ishikawa, Daichi/
Content Type Journal Article
Journal Title Journal of Electronic Materials
Volume 51
Issue 2
Published Date 2022-01-03
departments Liberal Arts and Sciences