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ID 114029
Title Alternative
Measurement of the residual stress in CrN coatings deposited on an Al alloy substrate
Author
Shirasaka, Kenta Tokushima University
Tanaka, Yuta IHI Corporation
Content Type
Journal Article
Description
Chromium nitride (CrN) coatings were deposited on Al alloy substrates using the arc ion plating method with different bias voltages and different thicknesses. The residual stresses of these samples were measured via x-ray diffraction using the sin2 ψ method because the CrN crystals in the coatings were nonoriented. The stress gradient across the CrN coating was calculated from the curved 2θ-sin2 ψ diagram. In the case of CrN coatings deposited at low bias voltage, the compressive residual stress that formed at the substrate interface was larger than the stress at the surface of the CrN coating. Conversely, in the case of CrN coatings deposited at high bias voltage, the compressive residual stress on the surface of the CrN coating was larger than the stress on the interface with the substrate. In CrN coatings deposited at high bias voltage, very large compressive residual stress on the CrN coating surface decreased with increasing coating thickness.
Journal Title
Journal of Vacuum Science & Technology B
ISSN
21662746
21662754
NCID
AA10804928
Publisher
American Vacuum Society
Volume
37
Issue
6
Start Page
062916
Published Date
2019-10-28
Remark
This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Vacuum Science & Technology B 37, 062916 (2019) and may be found at https://doi.org/10.1116/1.5118702.
This paper is part of the Conference Collection: 15th International Symposium on Sputtering and Plasma Processes (ISSP2019).
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language
eng
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departments
Science and Technology