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Matsuo, Shigeki
Matsuo, Shigeki
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Inscribing diffraction grating inside silicon substrate using a subnanosecond laser in one photon absorption wavelength
Author
Sugimoto, Kozo
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Matsuo, Shigeki
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Naoi, Yoshiki
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Content Type
Journal Article
Journal Title
Scientific Reports
Volume
10
Published Date
2020-12-08
departments
Science and Technology
