Influence of low-contrast subwavelength grating shape on polarization characteristics of GaN-based light-emitting diode emissions

We analytically investigated the influence of grating shape on polarization characteristics of the emission from a GaN-based light-emitting diode with a low-contrast sub-wavelength grating (SWG), such as SiO2-SWG. The electromagnetic field distribution, calculated using the finite difference time domain method, predicted that the polarization characteristics strongly depend on the grating-side slope. A trapezoid SiO2-SWG was fabricated on the GaN-based-LED using electron beam lithography. The optical characteristics of the electroluminescence agreed with those theoretically predicted, and we succeeded in demonstrating the influence of grating shape on the polarization of LED emission.

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