ID 113100
著者
キーワード
magnetic field sensor
subwavelength grating
waveguide
guided-mode
資料タイプ
学術雑誌論文
抄録
Highly sensitive optical sensor for magnetic field detection was experimentally demonstrated using a guided-mode resonance in waveguide with Ni nano-grating. The electromagnetic field distribution was calculated by finite-difference time-domain method in order to estimate the sensing performance of our device. The calculation results indicated that the optical characteristics of our sensor considerably varied with applying magnetic field. We fabricated the Ni-subwavelength grating/ Si3N4 waveguide structure on the optical glass substrate using electron beam lithography technique. The reflection peak resulting from the guided-mode in the waveguide was obtained with normal incident geometry. The peak intensity depended on static magnetic field applied to the structure, and the intensity changed by about 5 % for the magnetic field intensity of 39.4 mT. These experimental results suggest our sensor can sensitively detect magnetic field while avoiding use of the complex and expensive system, and our device is pretty suitable for the integration devices in internet of things society.
掲載誌名
Proceedings of SPIE
ISSN
0277786X
cat書誌ID
AA10619755
出版者
SPIE
10928
開始ページ
109281S
発行日
2019-03-04
備考
Yuusuke Takashima, Masanobu Haraguchi, and Yoshiki Naoi "Optical magnetic field sensor based on guided-mode resonance with Ni subwavelength grating/waveguide structure", Proc. SPIE 10928, High Contrast Metastructures VIII, 109281S (4 March 2019).https://doi.org/10.1117/12.2509490
権利情報
©2019 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.
EDB ID
349732
出版社版DOI
出版社版URL
フルテキストファイル
言語
eng
著者版フラグ
出版社版
部局
理工学系