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ID 113643
著者
Trovato, Clément Tokushima University|University of Bordeaux|Utsunomiya University
Ogawa, Takayuki Tokushima University
Abdelsalam Ibrahim, Dahi Ghareab Tokushima University|National Institute of Standards
Kawahito, Yusuke Tokushima University
Oe, Ryo Tokushima University
Shibuya, Kyuki Tokushima University
Abraham, Emmanuel Univ. Bordeaux
資料タイプ
学術雑誌論文
抄録
Digital holography (DH) is a promising method for non-contact surface topography because the reconstructed phase image can visualize the nanometer unevenness in a sample. However, the axial range of this method is limited to the range of the optical wavelength due to the phase wrapping ambiguity. Although the use of two different wavelengths of light and the resulting synthetic wavelength, i.e., synthetic wavelength DH, can expand the axial range up to several hundreds of millimeters, its axial precision does not reach sub-micrometer. In this article, we constructed a tunable external cavity laser diode phase-locked to an optical frequency comb, namely, an optical-comb-referenced frequency synthesizer, enabling us to generate multiple synthetic wavelengths within the range of 32 μm to 1.20 m. A multiple cascade link of the phase images among an optical wavelength ( = 1.520 μm) and 5 different synthetic wavelengths ( = 32.39 μm, 99.98 μm, 400.0 μm, 1003 μm, and 4021 μm) enables the shape measurement of a reflective millimeter-sized stepped surface with the axial resolution of 34 nm. The axial dynamic range, defined as the ratio of the axial range ( = 2.0 mm) to the axial resolution ( = 34 nm), achieves 5.9 × 105, which is larger than that of previous synthetic wavelength DH. Such a wide axial dynamic range capability will further expand the application field of DH for large objects with meter dimensions.
掲載誌名
Optics Express
ISSN
10944087
出版者
OSA publishing
26
20
開始ページ
26292
終了ページ
26306
発行日
2018-09-25
権利情報
© 2018 Optical Society of America. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved.
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出版社版DOI
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言語
eng
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出版社版
部局
理工学系