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ID 115147
著者
Okano, Yua Tokushima University
キーワード
Subwavelength grating
waveguide
ITO
magnetic field sensor
資料タイプ
学術雑誌論文
抄録
Magnetic field detection was experimentally demonstrated utilizing the optical spectral change of Al-subwavelength grating (SWG) on indium-tin-oxide (ITO) layer. The Al-SWG was fabricated on the ITO layer by electron-beam lithography technique. The fabricated sample shows the peak in the reflection spectrum resulting from the excitation of guided-mode in ITO layer. Electron accumulation layer in ITO was induced by applying magnetic field and flowing current, and the accumulation layer decreased the reflection peak intensity. As the magnetic field of 172 mT was applied, the intensity decreasing reached to 3 % of that without magnetic field. The intensity returned to the original value before measurement when the magnetic field and the current disappeared. These results indicate that our structure can detect tens of mT magnetic field without degaussing.
掲載誌名
Proceedings of SPIE
ISSN
0277786X
cat書誌ID
AA10619755
出版者
SPIE
11467
開始ページ
114671U
発行日
2020-08-21
備考
Y. Okano, Y. Takashima, M. Haraguchi, and Y. Naoi "Magnetically tunable visible reflectivity utilizing the electron accumulation in indium-tin-oxide waveguide layer with subwavelength grating", Proc. SPIE 11467, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVII, 114671U (21 August 2020); https://doi.org/10.1117/12.2568382
権利情報
© 2020 Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.
EDB ID
出版社版DOI
出版社版URL
フルテキストファイル
言語
eng
著者版フラグ
出版社版
部局
理工学系