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ID 112172
著者
髙島, 祐介 Tokushima University|Japan Society for the Promotion of Science 徳島大学 教育研究者総覧
キーワード
Subwavelength
Refractive index sensor
Grating
資料タイプ
学術雑誌論文
抄録
A high-sensitivity refractive index sensor is demonstrated for the first time, near the ultraviolet (UV) wavelength region using a Si3N4-subwavelength grating (SWG) with a normal incident optical geometry. Using the eigenmode within the Si3N4-SWG, a high sensitivity for the refractive index is expected by finite-difference time-domain calculation, without an oblique incident geometry. The proposed SWG is fabricated and the high-sensitivity refractive index sensor operating near the UV wavelength is experimentally and successfully developed. The normal transmitted intensity through the fabricated SWG varies considerably with slight changes in the refractive index. The experimental sensitivity of the SWG attained 1240 % per refractive index unit (RIU) and the sensitivity shows good agreement with the calculation. These experimental results suggest that our refractive index sensor with a normal incident geometry can measure a refractive index change of 8.06 x 10-4 RIU, if the optical detection system can measure an intensity change of 1%.
掲載誌名
Sensors and Actuators B : Chemical
ISSN
09254005
cat書誌ID
AA11540366
AA1078104X
出版者
Elsevier
255
Part 2
開始ページ
1711
終了ページ
1715
発行日
2017-08-30
権利情報
© 2017. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
EDB ID
出版社版DOI
出版社版URL
フルテキストファイル
言語
eng
著者版フラグ
著者版
部局
理工学系