Okano, Yua Tokushima University
magnetic field sensor
Magnetic field detection was experimentally demonstrated utilizing the optical spectral change of Al-subwavelength grating (SWG) on indium-tin-oxide (ITO) layer. The Al-SWG was fabricated on the ITO layer by electron-beam lithography technique. The fabricated sample shows the peak in the reflection spectrum resulting from the excitation of guided-mode in ITO layer. Electron accumulation layer in ITO was induced by applying magnetic field and flowing current, and the accumulation layer decreased the reflection peak intensity. As the magnetic field of 172 mT was applied, the intensity decreasing reached to 3 % of that without magnetic field. The intensity returned to the original value before measurement when the magnetic field and the current disappeared. These results indicate that our structure can detect tens of mT magnetic field without degaussing.
Proceedings of SPIE
Y. Okano, Y. Takashima, M. Haraguchi, and Y. Naoi "Magnetically tunable visible reflectivity utilizing the electron accumulation in indium-tin-oxide waveguide layer with subwavelength grating", Proc. SPIE 11467, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVII, 114671U (21 August 2020); https://doi.org/10.1117/12.2568382
© 2020 Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.
procspie_11467_114671U.pdf 780 KB