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ID 74519
タイトルヨミ
ナノ スケール ドウセキソウ マク ノ ネツショリ ニヨル ヒョウメン ケイジョウ ト ナイブ オウリョク ノ ヘンカ キョドウ
タイトル別表記
Behavior of Surface Shape and Internal Stress in Nono-scale Copper Multi-layered Film by Heat-treatment
著者
日下, 一也 徳島大学大学院ソシオテクノサイエンス研究部 徳島大学 教育研究者総覧 KAKEN研究者をさがす
英, 崇夫 徳島大学大学院ソシオテクノサイエンス研究部 徳島大学 教育研究者総覧 KAKEN研究者をさがす
金子, 健太 徳島大学大学院先端技術科学教育部
松英, 達也 新居浜工業高等専門学校環境材料工学科
坂田, 修身 高輝度光科学研究センター
キーワード
Thermal stress
In-situ measurement
Multi-layered film
Cu thin film
Synchrotron radiation
Sputtering
2θ-sin2ψ diagram
資料タイプ
紀要論文
抄録
The specimen prepared in this study was multi-layer aluminum nitride and copper films deposited on thermal oxidation silicon by dc sputtering. Thermal stresses in the copper layers were investigated by ultra high X-rays of synchrotron radiation in the heating and cooling process. It found from the sin2Ψ diagrams of the multi-layered film that the copper layers consisted of crystal grains which had two different orientations. One was randomly orientation, and the other was {111} orientation. The FWHM of the diffraction from the {111}-oriented crystal grains was constant regardless of heating temperature. On the other hand, the FWHM of the diffraction from the randomly-oriented crystal grains was decreased with increasing heating temperature at 1st heating cycle and it became constant regardless of heating temperature after 1st heating cycle. The 2θ-sin2θ diagrams of the multi-layered film for the stress measurement showed non-linear. We could obtain thermal stresses in two different orientation crystal grains from the non-linear 2θ-sin2θ diagram at same time. For both crystal grains, the thermal stress differences between the 1st heating and the 1st cooling cycles were shown as a hysteresis loop. In the case of the 2nd thermal cycles, the thermal stresses changed linearly for both crystal grains. For the 1st heating cycle, the compressive thermal stress in the {111}-oriented crystal grains was larger than that in the randomly-oriented one.
掲載誌名
徳島大学大学院ソシオテクノサイエンス研究部研究報告
ISSN
21859094
cat書誌ID
AA12214889
54
開始ページ
44
終了ページ
50
並び順
44
発行日
2009
フルテキストファイル
言語
jpn
部局
理工学系