ID 74509
Title Transcription
ヒカリヘンカン ポリタイプ オ モチイタ ワイド バンド ギャップ
Title Alternative
Development of wide band-gap semiconductor three-dimensional devices by using photo-converted heteropolytipic structures
Author
Tomita, Takuro Institute of Technology and Science, Division of Ecosystem Design(Graduate School of Advanced Technology and Science, College of Earth and Life Environmental Engineering, Department of Ecosystem Engineering) Tokushima University Educator and Researcher Directory KAKEN Search Researchers
Matsuo, Shigeki Institute of Technology and Science, Division of Ecosystem Design(Graduate School of Advanced Technology and Science, College of Earth and Life Environmental Engineering, Department of Ecosystem Engineering)
Okada, Tatsuya Institute of Technology and Science, Division of Advanced Materials(Graduate School of Advanced Technology and Science, College of Systems Innovation Engineering, Department of Mechanical Engineering) Tokushima University Educator and Researcher Directory KAKEN Search Researchers
Naoi, Yoshiki Institute of Technology and Science, Division of Advanced Materials (Graduate School of Advanced Technology and Science, College of Systems Innovation Engineering Course, Department of Electrical and Electronic Engineering) Tokushima University Educator and Researcher Directory KAKEN Search Researchers
Keywords
semiconductor
laser
laser-ablation
modification
laser-induced periodic structure
Content Type
Departmental Bulletin Paper
Description
Femtosecond laser-induced structural transformations in wide band-gap semiconductors were
studied for the development of the fabrication technique for three-dimensional electronic
circuits. In particular, we will report the results on the femtosecond laser-induced periodic
structures produced on wide band-gap materials. We also investigated the material properties of
laser-irradiated spot by using confocal micro Raman spectroscopy and transmission electron
microscopy. We will discuss the effect of femtosecond laser-irradiation on wide band-gap
semiconductors.
Journal Title
徳島大学大学院ソシオテクノサイエンス研究部研究報告
ISSN
21859094
NCID
AA12214889
Volume
52
Published Date
2007
FullText File
language
jpn
departments
Science and Technology